APA (7th ed.) Citation

Reichmanis, E., MacDonald, S. A., & Iwayanagi, T. (1989). Polymers in microlithography: Materials and processes. American Chemical Society.

Chicago Style (17th ed.) Citation

Reichmanis, Elsa, Scott A. MacDonald, and Takao Iwayanagi. Polymers in Microlithography: Materials and Processes. Washington, DC: American Chemical Society, 1989.

MLA (9th ed.) Citation

Reichmanis, Elsa, et al. Polymers in Microlithography: Materials and Processes. American Chemical Society, 1989.