Polymers for high technology electronics and photonics - Bowden, M. J. 1943-; Turner, S. Richard 1942- (Washington, DC American Chemical Society, 1987)
Includes bibliographies and indexes.
Electronic reproduction.
Keywords: Polymers -- Congresses; Photoresists -- Congresses; Microlithography -- Materials -- Congresses; Microelectronics -- Materials -- Congresses; Electronic books