APA (7th ed.) Citation

Casper, L. A. (1986). Microelectronics processing: Inorganic materials characterization. American Chemical Society.

Chicago Style (17th ed.) Citation

Casper, L. A. Microelectronics Processing: Inorganic Materials Characterization. Washington, DC: American Chemical Society, 1986.

MLA (9th ed.) Citation

Casper, L. A. Microelectronics Processing: Inorganic Materials Characterization. American Chemical Society, 1986.

Warning: These citations may not always be 100% accurate.