Casper, L. A. (1986). Microelectronics processing: Inorganic materials characterization. American Chemical Society.
Cita Chicago (17th ed.)Casper, L. A. Microelectronics Processing: Inorganic Materials Characterization. Washington, DC: American Chemical Society, 1986.
Cita MLA (9th ed.)Casper, L. A. Microelectronics Processing: Inorganic Materials Characterization. American Chemical Society, 1986.
Atenció: Aquestes cites poden no estar 100% correctes.