Geng, H. (2018). Semiconductor manufacturing handbook (Second edition.). McGraw-Hill Education.
Cita Chicago (17th ed.)Geng, Hwaiyu. Semiconductor Manufacturing Handbook. Second edition. New York: McGraw-Hill Education, 2018.
Cita MLA (9th ed.)Geng, Hwaiyu. Semiconductor Manufacturing Handbook. Second edition. McGraw-Hill Education, 2018.
Atenció: Aquestes cites poden no estar 100% correctes.