00000cmm a2200000 i 4500 UP-99796217613410515 Buklod 20230131130703.0 m |o d | cr cu|mmmmuaua 230131s2015 xx u 9780323299619 (eBook) (iLib)UPD-00516572274 DENGII rda eng DMLUC TA 418.7 D48 2015eb Developments in surface contamination and cleaning cleaning techniques Rajiv Kohli, K.L. Mittal, editors. Oxford William Andrew [2015] 1 online resource text rdacontent computer rdamedia online resource rdacarrier IP based subscription, on campus and remote access. Access via Electronic Resources of the UPD Engineering Library and University Library websites. As device sizes in the semiconductor industries shrink, devices become more vulnerable to smaller contaminant particles, and most conventional cleaning techniques employed in the industry are not effective at smaller scales. The book series Developments in Surface Contamination and Cleaning as a whole provides an excellent source of information on these alternative cleaning techniques as well as methods for characterization and validation of surface contamination. Each volume has a particular topical focus, covering the key techniques and recent developments in the area. Several novel wet and dry surface cleaning methods are addressed in this Volume. Many of these methods have not been reviewed previously, or the previous reviews are dated. These methods are finding increasing commercial application and the information in this book will be of high value to the reader. Edited by the leading experts in small-scale particle surface contamination, cleaning and cleaning control these books will be an invaluable reference for researchers and engineers in R&D, manufacturing, quality control and procurement specification situated in a multitude of industries such as: aerospace, automotive, biomedical, defense, energy, manufacturing, microelectronics, optics and xerography.--Provided by publisher. Surfaces (Technology). Surface contamination Prevention. Particles Measurement. Cleaning. Coatings. Electronic books. Kohli, Rajiv editor. Mittal, K.L. editor. Electronic Resource https://doi.org/10.1016/C2013-0-19084-8 Available for University of the Philippines System via ScienceDirect. Click here to access https://www-sciencedirect-com.ezproxy.engglib.upd.edu.ph/book/9780323299619/developments-in-surface-contamination-and-cleaning#book-info Available for University of the Philippines System via ScienceDirect. Click here to access remotely thru EZproxy FO UPD DENG-II TA 418.7 D48 2015EB Electronic Resource