SpringerLink (Online service) & Yan, J. (2018). Micro and nano fabrication technology. Springer Singapore. https://doi.org/10.1007/978-981-13-0098-1
Chicago Style (17th ed.) CitationSpringerLink (Online service) and Jiwang Yan. Micro and Nano Fabrication Technology. Singapore: Springer Singapore, 2018. https://doi.org/10.1007/978-981-13-0098-1.
MLA (9th ed.) CitationSpringerLink (Online service) and Jiwang Yan. Micro and Nano Fabrication Technology. Springer Singapore, 2018. https://doi.org/10.1007/978-981-13-0098-1.
Warning: These citations may not always be 100% accurate.