APA (7th ed.) Citation

Crean, G. M., Stuck, R., & Woollam, J. A. (1993). Semiconductor materials analysis and fabrication process control: A volume in European materials research society symposia proceedings. North-Holland. https://doi.org/10.1016/C2009-0-13065-9

Chicago Style (17th ed.) Citation

Crean, G. M., R. Stuck, and John A. Woollam. Semiconductor Materials Analysis and Fabrication Process Control: A Volume in European Materials Research Society Symposia Proceedings. Amsterdam: North-Holland, 1993. https://doi.org/10.1016/C2009-0-13065-9.

MLA (9th ed.) Citation

Crean, G. M., et al. Semiconductor Materials Analysis and Fabrication Process Control: A Volume in European Materials Research Society Symposia Proceedings. North-Holland, 1993. https://doi.org/10.1016/C2009-0-13065-9.