C,H,N and O in Si and characterization and simulation of materials and processes A volume in European materials research society symposia proceedings - Borghesi, A.; Gosele, U.M.; Vanhellemont, J.; Djafari-Rouhani, M.; Gue, A.M. (Amsterdam Elsevier, 1996)
Includes bibliographical references and indexes.
Keywords: Semiconductors -- Congresses; Silicon -- Congresses; Semiconductors -- Defects -- Congresses; Electronic books