C,H,N and O in Si and characterization and simulation of materials and processes A volume in European materials research society symposia proceedings

Bibliographic Details
Other Authors:	Borghesi, A. (Editor), Gosele, U.M (Editor), Vanhellemont, J. (Editor), Djafari-Rouhani, M. (Editor), Gue, A.M (Editor)
Format:	Electronic Resource
Language:	English
Published:	Amsterdam Elsevier [1996]
Subjects:	Semiconductors > Congresses. Silicon > Congresses. Semiconductors > Defects > Congresses. Electronic books.
Online Access:	Available for University of the Philippines System via ScienceDirect. Click here to access Also available remotely for University of the Philippines System via ScienceDirect. Click here to access thru EZproxy