Epitaxial silicon technology - Baliga, B. Jayant 1948- (Orlando Academic Press, 1986)
Silicon vapor phase epitaxy / H.M. Liaw and J.W. Rose -- Silicon molecular beam epitaxy / Subramanian S. Iyer -- Silicon liquid phase epitaxy / B. Jayant Baliga -- Silicon on sapphire heteroepitaxy / Prahalad K. Vasudev -- Silicon-on-insulator epitaxy / Hon Wai Lam.
Includes bibliographies and index.
Keywords: Semiconductors -- Design and construction; Silicon crystals -- Growth; Epitaxy; Silicon-on-insulator technology; Electronic books