Detection and classification of defect patterns on semiconductor wafers

Detection and classification of defect patterns on semiconductor wafers

Bibliographische Detailangaben
Veröffentlicht in:IIE Transactions : Quality and Reliability Engineering 38, 12 (2006 (D)).
1. Verfasser: Chih-Hsuan Wang
Weitere Verfasser: Way Kuo, Halima Bensmail
Format: Artikel
Sprache:English
Schlagworte:
Defect recognition.
Process engineering.