Chih-Hsuan Wang, Way Kuo, & Halima Bensmail. Detection and classification of defect patterns on semiconductor wafers. IIE Transactions : Quality and Reliability Engineering.
Chicago-Zitierstil (17. Ausg.)Chih-Hsuan Wang, Way Kuo, und Halima Bensmail. "Detection and Classification of Defect Patterns on Semiconductor Wafers." IIE Transactions : Quality and Reliability Engineering .
MLA-Zitierstil (9. Ausg.)Chih-Hsuan Wang, et al. "Detection and Classification of Defect Patterns on Semiconductor Wafers." IIE Transactions : Quality and Reliability Engineering, .
Achtung: Diese Zitate sind unter Umständen nicht zu 100% korrekt.