Carbide and DLC synthesis within the Ti-Al-C system via sputter deposition

Ti-Al-C thin films were synthesized by sputter deposition using a magnetized Sheet Plasma Negative Ion Source (SPNIS). Several factors affecting the deposition were considered in this study: methane percentage, deposition time, filling pressure, target bias and deposition set-up. The relative compos...

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書目詳細資料
主要作者: Viloan, Rommel Paulo Basence (Author)
其他作者: Ramos, Henry J. (adviser.)
格式: Thesis
語言:English
出版: Quezon City Materials Science and Engineering Program, College of Science, University of the Philippines Diliman 2013.
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