Carbide and DLC synthesis within the Ti-Al-C system via sputter deposition
Ti-Al-C thin films were synthesized by sputter deposition using a magnetized Sheet Plasma Negative Ion Source (SPNIS). Several factors affecting the deposition were considered in this study: methane percentage, deposition time, filling pressure, target bias and deposition set-up. The relative compos...
| Auteur principal: | |
|---|---|
| Autres auteurs: | |
| Format: | Thèse |
| Langue: | English |
| Publié: |
Quezon City
Materials Science and Engineering Program, College of Science, University of the Philippines Diliman
2013.
|
| Sujets: |