Carbide and DLC synthesis within the Ti-Al-C system via sputter deposition
Ti-Al-C thin films were synthesized by sputter deposition using a magnetized Sheet Plasma Negative Ion Source (SPNIS). Several factors affecting the deposition were considered in this study: methane percentage, deposition time, filling pressure, target bias and deposition set-up. The relative compos...
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| Формат: | Диссертация |
| Язык: | English |
| Опубликовано: |
Quezon City
Materials Science and Engineering Program, College of Science, University of the Philippines Diliman
2013.
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