Gines, A. R. B., & Ramos, H. J. (2013). Formation of nanopillars on 4H-SiC via self-masking CF4 plasma etching in a gas disharge ion source. National Institute of Physics, College of Science, University of the Philippines Diliman.
Trích dẫn kiểu Chicago (xuất bản lần thứ 7)Gines, Arnold Rey B., và Henry J. Ramos. Formation of Nanopillars on 4H-SiC via Self-masking CF4 Plasma Etching in a Gas Disharge Ion Source. Quezon City: National Institute of Physics, College of Science, University of the Philippines Diliman, 2013.
Trích dẫn kiểu MLA (xuất bản lần thứ 9)Gines, Arnold Rey B., và Henry J. Ramos. Formation of Nanopillars on 4H-SiC via Self-masking CF4 Plasma Etching in a Gas Disharge Ion Source. National Institute of Physics, College of Science, University of the Philippines Diliman, 2013.