MEMS and nanotechnology, volume 5 proceedings of the 2015 Annual Conference on Experimental and Applied Mechanics - Annual Conference on Experimental and Applied Mechanics Costa Mesa, Calif.) 2015; Prorok, Barton C.; Starman, LaVern A.; SpringerLink (Online service). (Cham Springer, 2016)
Electronic reproduction.
Keywords: Nanotechnology -- Congresses; Microelectromechanical systems -- Congresses; Mechanics, Applied -- Congresses; Electronic books