Handbook of silicon based MEMS materials and technologies

Handbook of silicon based MEMS materials and technologies

عرض كل الإصدارات (2)
التفاصيل البيبلوغرافية
مؤلفون آخرون: Tilli, Markku (المحرر)
التنسيق: Electronic Resource
اللغة:English
منشور في: London, UK William Andrew/Elsevier 2015.
الطبعة:Second edition.
الموضوعات:
Microelectromechanical systems.
Microelectromechanical systems > Materials.
Silicon > Electric properties.
Electronic books.
الوصول للمادة أونلاين:Available for University of the Philippines System via ScienceDirect. Click here to access
Also available remotely for University of the Philippines System via ScienceDirect. Click here to access thru EZproxy