Tilli, M. (2015). Handbook of silicon based MEMS materials and technologies (Second edition.). William Andrew/Elsevier.
Chicago Style (17th ed.) CitationTilli, Markku. Handbook of Silicon Based MEMS Materials and Technologies. Second edition. London, UK: William Andrew/Elsevier, 2015.
MLA (9th ed.) CitationTilli, Markku. Handbook of Silicon Based MEMS Materials and Technologies. Second edition. William Andrew/Elsevier, 2015.
Warning: These citations may not always be 100% accurate.