Tilli, M. (2015). Handbook of silicon based MEMS materials and technologies (Second edition.). William Andrew/Elsevier.
Citazione stile Chigago Style (17a edizione)Tilli, Markku. Handbook of Silicon Based MEMS Materials and Technologies. Second edition. London, UK: William Andrew/Elsevier, 2015.
Citatione MLA (9a ed.)Tilli, Markku. Handbook of Silicon Based MEMS Materials and Technologies. Second edition. William Andrew/Elsevier, 2015.
Attenzione: Queste citazioni potrebbero non essere precise al 100%.