Dynamic maskless optical lithography

We propose techniques for dynamic and maskless optical lithography. We construct the experimental set-ups for these techniques and evaluate the performance of the set-ups in terms of the resolution. We first construct a beam scanning, set-up which directly write the pattern on the photoresist sample...

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Bibliographic Details

Main Author:	Hilario, Paul Leonard Atchong C. (Author)
Other Authors:	Tapang, Giovanni A. (thesis adviser.)
Format:	Thesis
Language:	English
Subjects:	Photolithography.