Semblante, O. D., & Somintac, A. S. Synthesis of aluminum nitride thin film using reactive RF-magnetron sputtering.
Cita Chicago Style (17a ed.)Semblante, Oliver D., y Armando S. Somintac. Synthesis of Aluminum Nitride Thin Film Using Reactive RF-magnetron Sputtering.
Cita MLA (9a ed.)Semblante, Oliver D., y Armando S. Somintac. Synthesis of Aluminum Nitride Thin Film Using Reactive RF-magnetron Sputtering.
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