Two-dimensional parametric mapping and characterization of semiconductor devices using optical-feedback confocal microscopy

A method of measuring very important two-dimensional parameters of semiconductor devices is demonstrated using an optical feedback confocal microscope. By utilizing different wavelength laser diodes for the microscope, either photothermal stimulation or photoexcitationn of the semiconducting samples...

وصف كامل

التفاصيل البيبلوغرافية
المؤلف الرئيسي: Sarmiento, Raymund Lee Antonio C. (مؤلف)
مؤلفون آخرون: Saloma, Caesar A. (thesis adviser.)
التنسيق: أطروحة
اللغة:English
منشور في: Quezon City National Institute of Physics, College of Science, University of the Philippines Diliman 2009.
الموضوعات: