Two-dimensional parametric mapping and characterization of semiconductor devices using optical-feedback confocal microscopy
A method of measuring very important two-dimensional parameters of semiconductor devices is demonstrated using an optical feedback confocal microscope. By utilizing different wavelength laser diodes for the microscope, either photothermal stimulation or photoexcitationn of the semiconducting samples...
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| Aineistotyyppi: | Opinnäyte |
| Kieli: | English |
| Julkaistu: |
Quezon City
National Institute of Physics, College of Science, University of the Philippines Diliman
2009.
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