Design, modeling and control of nanopositioning systems

Design, modeling and control of nanopositioning systems

Bibliografiske detaljer
Main Authors: Fleming, Andrew J. 1977- (Author), Leang, Kam K. (Author)
Format: Electronic Resource
Sprog:English
Udgivet: Cham [Switzerland] Springer [2014]
Fag:
Nanotechnology.
Nanoelectromechanical systems.
Electronic books.
Online adgang:Available for University of the Philippines Diliman College of Engineering via Springer. Click here to access