Micro and nano fabrication tools and processes - Gatzen, Hans-Heinrich; Saile, Volker; Leuthold, Jürg; SpringerLink (Online service). (Berlin, Heidelberg Springer Berlin Heidelberg, 2015)
Introduction-MEMS, a Historical Perspective -- Vacuum Technology -- Deposition Technologies -- Etching Technologies -- Doping and Surface Modification -- Lithography -- LIGA -- Nanofabrication by Self-Assembly -- Enabling Technologies I - Wafer Planarization and Bonding -- Enabling Technologies II - Contamination Control -- Device Fabrication - An Example.
Electronic reproduction.
Keywords: Microelectromechanical systems; Electronic books