APA (7th ed.) Citation

Gatzen, H., Saile, V., & Leuthold, J. (2015). Micro and nano fabrication: Tools and processes. Springer Berlin Heidelberg. https://doi.org/10.1007/978-3-662-44395-8

Chicago Style (17th ed.) Citation

Gatzen, Hans-Heinrich, Volker Saile, and Jürg Leuthold. Micro and Nano Fabrication: Tools and Processes. Berlin, Heidelberg: Springer Berlin Heidelberg, 2015. https://doi.org/10.1007/978-3-662-44395-8.

MLA (9th ed.) Citation

Gatzen, Hans-Heinrich, et al. Micro and Nano Fabrication: Tools and Processes. Springer Berlin Heidelberg, 2015. https://doi.org/10.1007/978-3-662-44395-8.