Introduction to micromechanisms and microactuators - Ghosh, A. (Amitabha) 1941-; Corves, Burkhard; SpringerLink (Online service). (New Delhi Springer India, 2015)
Introduction -- Miniaturization and Microsystems -- Scaling Laws: Science of Miniaturization -- Micromechanisms -- Design of Micromechanisms -- Dynamics of Micromechanisms -- Microactuators -- Microfabrication and Futuristic Issues.
Electronic reproduction.
Keywords: Microelectromechanical systems; Electronic books