Novel techniques in semiconductor characterization and failure analysis using optical feedback laser scanning microscopy
We have developed an inexpensive and compact Optical Feedback Laser Scanning Microscope (OFLSM) that simultaneously obtains confocal reflectance and current images in a semiconductor sample.
| المؤلف الرئيسي: | |
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| مؤلفون آخرون: | |
| التنسيق: | أطروحة |
| اللغة: | English |
| منشور في: |
Quezon City
National Institute of Physics, College of Science, University of the Philippines Diliman
2007.
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| الموضوعات: |