Dry etching technology for semiconductors - Nojiri, Kazuo; Ikezi, Yuki; SpringerLink (Online service). (Cham Springer, 2015)
Contribution of Dry Etching Technology to Progress of Semiconductor Integrated Circuit -- Mechanism of Dry Etching -- Dry Etching of Various Materials -- Dry Etching Equipments -- Dry Etching Damage -- Latest Dry Etching Technologies -- Future Challenges and Outlook for Dry Etching Technology.
"Based on translation from the Japanese language edition: Hajimete no handotai dry etching gijutsu by Kazuo Nojiri."
Electronic reproduction.
Keywords: Plasma etching; Semiconductors -- Etching; Electronic books