Cita APA

Nojiri, K., & Ikezi, Y. (2015). Dry etching technology for semiconductors. Springer. https://doi.org/10.1007/978-3-319-10295-5

Citación estilo Chicago

Nojiri, Kazuo, and Yuki Ikezi. Dry Etching Technology for Semiconductors. Cham: Springer, 2015. https://doi.org/10.1007/978-3-319-10295-5.

Cita MLA

Nojiri, Kazuo, and Yuki Ikezi. Dry Etching Technology for Semiconductors. Springer, 2015. https://doi.org/10.1007/978-3-319-10295-5.