APA (7th ed.) Citation

Nojiri, K., & Ikezi, Y. (2015). Dry etching technology for semiconductors. Springer. https://doi.org/10.1007/978-3-319-10295-5

Chicago Style (17th ed.) Citation

Nojiri, Kazuo, and Yuki Ikezi. Dry Etching Technology for Semiconductors. Cham: Springer, 2015. https://doi.org/10.1007/978-3-319-10295-5.

MLA (9th ed.) Citation

Nojiri, Kazuo, and Yuki Ikezi. Dry Etching Technology for Semiconductors. Springer, 2015. https://doi.org/10.1007/978-3-319-10295-5.