Nojiri, K., & Ikezi, Y. (2015). Dry etching technology for semiconductors. Springer. https://doi.org/10.1007/978-3-319-10295-5
Citación estilo ChicagoNojiri, Kazuo, and Yuki Ikezi. Dry Etching Technology for Semiconductors. Cham: Springer, 2015. https://doi.org/10.1007/978-3-319-10295-5.
Cita MLANojiri, Kazuo, and Yuki Ikezi. Dry Etching Technology for Semiconductors. Springer, 2015. https://doi.org/10.1007/978-3-319-10295-5.
Warning: These citations may not always be 100% accurate.