Silicide technology for integrated circuits
This book begins with an overview of silicide technology and moves on to provide the fundamentals of silicide formation, including various processing methods. Topics such as the optical emission properties of Fe silicide and their importance for Si-based optoelectronics are discussed, along with Si-...
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| Format: | Electronic Resource |
| Sprache: | English |
| Veröffentlicht: |
London, United Kingdom
Institution of Engineering and Technology
2004.
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| Online Zugang: | Available for University of the Philippines Diliman via IET Digital Library. Click here to access Also available remotely for University of the Philippines Diliman via IET Digital Library. Click here to access thru EZproxy |