(1991). Journal of vacuum science & technology. B, Microelectronics and nanometer structures. Published for the Society by the American Institute of Physics.
Citación estilo ChicagoJournal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures. New York: Published for the Society by the American Institute of Physics, 1991.
Cita MLAJournal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures. Published for the Society by the American Institute of Physics, 1991.
Warning: These citations may not always be 100% accurate.