(1983). Journal of vacuum science & technology. A, Vacuum, surfaces, and films. Published for the American Vacuum Society by the American Institute of Physics.
Chicago Style (17th ed.) CitationJournal of Vacuum Science & Technology. A, Vacuum, Surfaces, and Films. Woodbury, N.Y: Published for the American Vacuum Society by the American Institute of Physics, 1983.
MLA (9th ed.) CitationJournal of Vacuum Science & Technology. A, Vacuum, Surfaces, and Films. Published for the American Vacuum Society by the American Institute of Physics, 1983.
Warning: These citations may not always be 100% accurate.