Silicon carbide microsystems for harsh environments
Silicon Carbide Microsystems for Harsh Environments reviews state-of-the-art Silicon Carbide (SiC) technologies that, when combined, create microsystems capable of surviving in harsh environments. Technological readiness of the system components, key issues when integrating these components into sys...
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| Format: | Electronic Resource |
| Sprache: | English |
| Veröffentlicht: |
New York
Springer
2011.
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| Schriftenreihe: | MEMS reference shelf
22 |
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| Online Zugang: | Available for University of the Philippines Diliman via SpringerLink. Click here to access |