Silicon carbide microsystems for harsh environments

Silicon Carbide Microsystems for Harsh Environments reviews state-of-the-art Silicon Carbide (SiC) technologies that, when combined, create microsystems capable of surviving in harsh environments. Technological readiness of the system components, key issues when integrating these components into sys...

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Detalles Bibliográficos
Autor Principal: Wijesundara, Muthu B.J
Autor Corporativo: SpringerLink (Online service)
Outros autores: Wijesundara, Muthu, Azevedo, Robert
Formato: Electronic Resource
Idioma:English
Publicado: New York Springer 2011.
Series:MEMS reference shelf 22
Subjects:
Acceso en liña:Available for University of the Philippines Diliman via SpringerLink. Click here to access