Microsystems dynamics
In recent years microelectromechanical systems (MEMS) have emerged as a new technology with enormous application potential. MEMS manufacturing techniques are essentially the same as those used in the semiconductor industry, therefore they can be produced in large quantities at low cost. The added be...
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| Формат: | Electronic Resource |
| Язык: | English |
| Опубликовано: |
New York
Springer
2011.
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| Серии: | Intelligent systems, control, and automation : science an engineering
v. 44. |
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| Online-ссылка: | Available for University of the Philippines Diliman via SpringerLink. Click here to access |