Microsystems dynamics
In recent years microelectromechanical systems (MEMS) have emerged as a new technology with enormous application potential. MEMS manufacturing techniques are essentially the same as those used in the semiconductor industry, therefore they can be produced in large quantities at low cost. The added be...
| मुख्य लेखक: | |
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| निगमित लेखक: | |
| अन्य लेखक: | |
| स्वरूप: | Electronic Resource |
| भाषा: | English |
| प्रकाशित: |
New York
Springer
2011.
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| श्रृंखला: | Intelligent systems, control, and automation : science an engineering
v. 44. |
| विषय: | |
| ऑनलाइन पहुंच: | Available for University of the Philippines Diliman via SpringerLink. Click here to access |