MEMS reliability

Successfully bringing MEMS-based products to market hinges on engineering the component to have sufficient reliability for the intended application, yet the reliability and qualification methodology for MEMS based products is not widely understood. Companies that have a deep understanding of MEMS re...

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Dades bibliogràfiques

Autor principal:	Hartzell, Allyson L.
Autor corporatiu:	SpringerLink (Online service)
Altres autors:	Da Silva, Mark G., Shea, Herbert R., Senturia, Stephen D. 1940-
Format:	Electronic Resource
Idioma:	English
Publicat:	New York Springer 2011.
Col·lecció:	MEMS reference shelf
Matèries:	Microelectromechanical systems > Reliability. Electronic books.
Accés en línia:	Available for University of the Philippines Diliman via SpringerLink. Click here to access