Hartzell, A. L., Da Silva, M. G., Shea, H. R., & Senturia, S. D. (2011). MEMS reliability. Springer.
Citación estilo ChicagoHartzell, Allyson L., Mark G. Da Silva, Herbert R. Shea, and Stephen D. Senturia. MEMS Reliability. New York: Springer, 2011.
Cita MLAHartzell, Allyson L., et al. MEMS Reliability. Springer, 2011.
Warning: These citations may not always be 100% accurate.