MEMS materials and processes handbook
Handbook is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on 'Materials' and 'Processes'. The extensive 'Material Sel...
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| Outros autores: | , |
| Formato: | Electronic Resource |
| Idioma: | English |
| Publicado: |
New York, London
Springer
2011.
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| Series: | MEMS Reference Shelf
1 |
| Subjects: | |
| Acceso en liña: | Available for University of the Philippines Diliman via SpringerLink. Click here to access |