MEMS materials and processes handbook
Handbook is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on 'Materials' and 'Processes'. The extensive 'Material Sel...
| 企业作者: | |
|---|---|
| 其他作者: | , |
| 格式: | Electronic Resource |
| 语言: | English |
| 出版: |
New York, London
Springer
2011.
|
| 丛编: | MEMS Reference Shelf
1 |
| 主题: | |
| 在线阅读: | Available for University of the Philippines Diliman via SpringerLink. Click here to access |