MEMS materials and processes handbook

MEMS materials and processes handbook

Handbook is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on 'Materials' and 'Processes'. The extensive 'Material Sel...

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Detaylı Bibliyografya
Müşterek Yazar: SpringerLink (Online service)
Diğer Yazarlar: Ghodssi, Reza, Lin, Pinyen
Materyal Türü: Electronic Resource
Dil:English
Baskı/Yayın Bilgisi: New York, London Springer 2011.
Seri Bilgileri:MEMS Reference Shelf 1
Konular:
Microelectromechanical systems > Materials.
Microelectromechanical systems.
Electronic books.
Online Erişim:Available for University of the Philippines Diliman via SpringerLink. Click here to access