APA (7th ed.) Citation

SpringerLink (Online service), Ghodssi, R., & Lin, P. (2011). MEMS materials and processes handbook. Springer.

Chicago Style (17th ed.) Citation

SpringerLink (Online service), Reza Ghodssi, and Pinyen Lin. MEMS Materials and Processes Handbook. New York, London: Springer, 2011.

MLA (9th ed.) Citation

SpringerLink (Online service), et al. MEMS Materials and Processes Handbook. Springer, 2011.