Developments in surface contamination and cleaning v.3 Methods for removal of particle contaminants.

Bibliografiset tiedot
Muut tekijät:	Kohli, Rajiv 1947-, Mittal, K. L. 1945-
Aineistotyyppi:	Electronic Resource
Kieli:	English
Julkaistu:	Oxford, U.K. Elsevier 2011.
Aiheet:	Surfaces (Technology) > Inspection. Surface contamination > Prevention. Particles > Measurement. Cleaning. Coatings. Dust control. Electronic books.
Linkit:	Available for University of the Philippines System via ScienceDirect. Click here to access Also available remotely for University of the Philippines System via ScienceDirect. Click here to access thru EZproxy