APA (7th ed.) Citation

Cameron, D., Kaariainen, M., & Sherman, A. Atomic layer deposition: Principles, characteristics, and nanotechnology applications.

Chicago Style (17th ed.) Citation

Cameron, David, Marja-Leena Kaariainen, and Arthur Sherman. Atomic Layer Deposition: Principles, Characteristics, and Nanotechnology Applications.

MLA (9th ed.) Citation

Cameron, David, et al. Atomic Layer Deposition: Principles, Characteristics, and Nanotechnology Applications.