Nanofabrication handbook - Cabrini, Stefano; Kawata, Satoshi 1966-. (Boca Raton, Fla. CRC Press, 2012)
pt. 1. Standard lithography -- pt. 2. New lithographic techniques -- pt. 3. Nanofabrication applications.
Keywords: Nanostructured materials -- Handbooks, manuals, etc; Nanostructures -- Handbooks, manuals, etc; Electronic books