MEMS/MOEMS packaging concepts, designs, materials, and processes

Bibliographische Detailangaben
1. Verfasser:	Gilleo, Ken
Format:	Electronic Resource
Sprache:	English
Veröffentlicht:	New York McGraw-Hill c2005.
Schlagworte:	Microelectronic packaging. Microelectromechanical systems. Optoelectronic devices. Electronic books.
Online Zugang:	Available for University of the Philippines Diliman via McGraw-Hill eBook Library. Click here to access