Micro mechanical systems principles and technology

Detalles Bibliográficos
Outros autores:	Fukuda, T. 1948- (Toshio), Menz, W. (Wolfgang)
Formato:	Electronic Resource
Idioma:	English
Publicado:	Amsterdam Elsevier 1998.
Series:	Handbook of sensors and actuators v. 6.
Subjects:	Microelectromechanical systems > Handbooks, manuals, etc. Electronic books.
Acceso en liña:	Available for University of the Philippines System via ScienceDirect. Click here to access Also available remotely for University of the Philippines System via ScienceDirect. Click here to access thru EZproxy