APA (7th ed.) Citation

Fukuda, T., & Menz, W. (1998). Micro mechanical systems: Principles and technology. Elsevier.

Chicago Style (17th ed.) Citation

Fukuda, T., and W. Menz. Micro Mechanical Systems: Principles and Technology. Amsterdam: Elsevier, 1998.

MLA (9th ed.) Citation

Fukuda, T., and W. Menz. Micro Mechanical Systems: Principles and Technology. Elsevier, 1998.