APA (7th ed.) Citation

Wu, B., & Kumar, A. (2009). Extreme ultraviolet lithography (First edition.). McGraw-Hill.

Chicago Style (17th ed.) Citation

Wu, Banqiu, and Ajay Kumar. Extreme Ultraviolet Lithography. First edition. New York: McGraw-Hill, 2009.

MLA (9th ed.) Citation

Wu, Banqiu, and Ajay Kumar. Extreme Ultraviolet Lithography. First edition. McGraw-Hill, 2009.