Integration of ferroelectric and piezoelectric thin films concepts and applications for microsystems

Integration of ferroelectric and piezoelectric thin films concepts and applications for microsystems

Bibliographic Details
Other Authors: Defay, Emmanuel
Format: Book
Language:English
Published: Hoboken, N.J. Wiley c2011.
Subjects:
Piezoelectric devices > Materials.
Ferroelectric thin films.
Miniature electronic equipment > Materials.