OSA proceedings on soft x-ray projection lithography, Vol. 18 proceedings of the Topical Meeting, May 10-12, 1993, Monterey, California - Hawryluck, Andrew M.; Stulen, R. H.; Optical Society of America (Washington, D.C. The Society)
Spine title: Soft x-ray projection lithography.
"Supported by Air Force Office of Scientific Research, Defense Advance Research Projects Agency, Department of Energy"
Keywords: X-ray lithography -- Congresses