APA (7th ed.) Citation

Optical Society of America, Hawryluck, A. M., & Stulen, R. H. OSA proceedings on soft x-ray projection lithography, Vol. 18: Proceedings of the Topical Meeting, May 10-12, 1993, Monterey, California. The Society.

Chicago Style (17th ed.) Citation

Optical Society of America, Andrew M. Hawryluck, and R. H. Stulen. OSA Proceedings on Soft X-ray Projection Lithography, Vol. 18: Proceedings of the Topical Meeting, May 10-12, 1993, Monterey, California. Washington, D.C: The Society.

MLA (9th ed.) Citation

Optical Society of America, et al. OSA Proceedings on Soft X-ray Projection Lithography, Vol. 18: Proceedings of the Topical Meeting, May 10-12, 1993, Monterey, California. The Society.